https://doi.org/10.1051/epjam/2015015
Research Article
Reconciling measured scattering response of 3D metamaterials with simulation
1
Air Force Research Laboratory, 3005 Hobson Way, Wright-Patterson AFB, OH
45433, USA
2
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM
87185, USA
* e-mail: dbburck@sandia.gov
Received:
31
August
2015
Accepted:
17
November
2015
Published online: 23 December 2015
Membrane projection lithography is used to create 3-dimensional unit cells in a silicon matrix decorated with metallic inclusions. The structures show pronounced resonances in the 4–16 µm wavelength range and demonstrate direct coupling to the magnetic field of a normally incident transverse electromagnetic (TEM) wave, a behavior only possible for vertically oriented resonators. Qualitative agreement between rigorous coupled wave analysis (RCWA) simulation and measured scattering response is shown. COMSOL simulations show that slight variations in both metallic inclusion and silicon unit cell physical dimensions can have large impact in the scattering response, so that design for manufacture of 3D metamaterial structures for applications should be done with care.
Key words: 3D metamaterials / Split ring resonator / Micro fabrication
© B.M. Adomanis et al., Published by EDP Sciences, 2015
This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
